JPH0553225B2 - - Google Patents
Info
- Publication number
- JPH0553225B2 JPH0553225B2 JP10308386A JP10308386A JPH0553225B2 JP H0553225 B2 JPH0553225 B2 JP H0553225B2 JP 10308386 A JP10308386 A JP 10308386A JP 10308386 A JP10308386 A JP 10308386A JP H0553225 B2 JPH0553225 B2 JP H0553225B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- detection head
- defect inspection
- robot
- surface defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manipulator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10308386A JPS62261040A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10308386A JPS62261040A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62261040A JPS62261040A (ja) | 1987-11-13 |
JPH0553225B2 true JPH0553225B2 (en]) | 1993-08-09 |
Family
ID=14344739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10308386A Granted JPS62261040A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62261040A (en]) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0769150B2 (ja) * | 1989-05-15 | 1995-07-26 | 日産自動車株式会社 | 測定装置 |
JPH0642914A (ja) * | 1992-07-24 | 1994-02-18 | Canon Inc | 変位測定装置 |
DE102004007830B4 (de) * | 2004-02-18 | 2007-05-10 | Isra Vision Systems Ag | Verfahren zur Lokalisierung von Fehlstellen und Markiersystem |
JP6857403B2 (ja) * | 2018-08-28 | 2021-04-14 | フロンティアシステム株式会社 | 管状体又は棒状体の検査装置 |
-
1986
- 1986-05-07 JP JP10308386A patent/JPS62261040A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62261040A (ja) | 1987-11-13 |
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